Electron Microprobe Analysis

This 1993 book gives a comprehensive account of both experimental and theoretical aspects of electron microprobe analysis, and is an extensively updated version of the seminal first edition, published in 1975. The design and operation of the instrument, including the electron column and both wavelength- and energy-dispersive X-ray spectrometers, are covered in the first part of the book. Experimental procedures for qualitative and quantitative analysis, using both types of spectrometer, are then discussed. Matrix ('ZAF') corrections, as required for quantitative analysis, are treated in some detail from both theoretical and practical viewpoints. Special considerations applying to the analysis of 'light' elements (atomic number below 10) are covered in a separate chapter. The emphasis throughout is on a sound understanding of principles and the treatment is applicable equally to the electron microprobe in its 'classical' form and to scanning electron microscopes fitted with X-ray spectrometers.